Double chamber evaporation system ZF-450

设备名称

Description

型号

Model

主要技术内容

Specification

主要用途

Usage

其它

Other

双室蒸发系统

Evaporates

equipments

ZF-450

极限真空：2x10^-4Pa

Ultimate cacuuum:2x10^-4Pa

蒸发室：φ450

Evaporates chamber:φ450

样品：100x100

Sample size:100x100

蒸发舟：8个

Boat of evaporate：8

等离子清洗功率：RF 300W

Plasma clean power：RF 300W

配气系统：1路流量控制

Gas flow  system:1-MFC,

flow control

有机发光器件研制

The research and the manufacturing

 of the machine piece that organic 

material give our light.