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Field emission test system

Classification:Other equipment Number of views:152

主要指标:

1. 电压:0-5000V,稳定度5×10-3/5分钟;

2. 电压分辨率:0—200V分辨率0.1V;200—5000V分辨率1V;

3. 阴阳级距离为0-500微米可调,精度为±1微米;

4. 极限真空5*10-7Pa;

烘烤温度:常温~200℃;

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