|
设备名称 Description |
型号 Model |
主要技术内容 Specification |
主要用途 Usage |
其它 Other |
|
双室蒸发系统
Evaporates equipments |
ZF-450 |
极限真空：2x10-4Pa Ultimate cacuuum:2x10-4Pa
蒸发室：φ450 Evaporates chamber:φ450
样品：100x100 Sample size:100x100
蒸发舟：8个 Boat of evaporate：8
等离子清洗功率：RF 300W Plasma clean power：RF 300W
配气系统：1路流量控制 Gas flow system:1-MFC, flow control
|
有机发光器件研制
The research and the manufacturing of the machine piece that organic material give our light. |
|
